Oxygen Effect in Annealing Process of Aluminium Doped Zinc Oxide Films
DOI:
https://doi.org/10.37134/ejsmt.vol5.2.4.2018Keywords:
Aluminium doped zinc oxide, Annealing, Oxygen, Structural properties, optical propertiesAbstract
Al doped ZnO (ZnO:Al) thin films was grown on corning glass substrate using dc magnetron sputtering. ZnO:Al thin film grown with plasma power 40 watt and 500 mTorr argon pressure for 120 minutes. Film was grown annealed on oxygen atmosphere with different pressure for 20 minutes. The crystalline of ZnO:Al film deposited has an hexagonal structure. The crystallites preferred orientation shift gradually from (002) to (101) direction as the pressure of oxygen increases. Transmittance in the visible regions increases with increasing pressure of oxygen about 81,27%. The optical characterization indicated that the band gap shift toward lower energies with increasing pressure of oxygen.
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References
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Morphology for Ethanol Sensing.Sensors, 7, 650-675 ISSN 1424-8220.
Benramache, S, Benhaoua, B, Chabane, F, Lemadi, FZ. (2013). Influence of growth time on crystalline structure. Conductivity and optical properties of ZnO thin films. J. Semicond 34, 023001-1.
Venkatachalam, S, Iida, Y, Kanno, Y. (2008). Preparation and characterization of Al doped ZnO thin films by PLD. Superlattice. Microst. 44, 127–135.
Rahmane, S, Djouadi, MA, Aida, MS, Barreau, N, Abdallah, B, Zoubir, NH. (2010). Power and pressure effects upon magnetron sputtered aluminum doped ZnO films properties. Thin Sol. Film. 519,5–10.
Tseng JY, Chen YT, Yang MY, Wang CY, Li PC. (2009). Thin solid films. 517:6310–4.
Yang W, Liu Z, Peng DL, Zhang F, Huang H, Xie Y. (2009). Appl Surf Sci. 255:5669–73.
Kuo SY, Chen WC, Lai FI, Cheng CP, Kuo HC, Wang SC. (2006). J Cryst Growth. 287:78.
Lee KE, Wang MS, Kim EJ, Hahn SH. (2009).CurrAppl Phys. 9:683–7.
Park, Jong Pil, Sin Kyu Kim, Jae-Young Park, Kang Min Ok, & II-Wun Shim. (2009). Preparation of ZnO Thin Films Using ZnO-Containing Single Precursor Through MOCVD Method. Bull. Korean Chem. Soc. Vol. 30, No. 1.
Zhou, Hong-ming, Dan-qingYi,Zhi-mingYu,Lai-rong Xiao, & Jian Li. (2007). Preparation ofAluminum DopedZinc Oxide Films and TheStudyof Their Microstructure,ElectricalandOptical Properties. Elsevier.ThinSolid Films,515, 6909–6914.
Ajimsha, R.S, A.K. Das, B.N. Singh, P. Misra, & L.M. Kukreja. (2010). Structural, Electrical and Optical Properties of
Dy Doped ZnO Thin films Grown by Buffer Assisted Pulsed Laser Deposition.Elsevier. Physica,E 42, 1838– 1843.
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Applied Surface Science, Vol. 256, pp.1895–1907.
Ramos-Barrado, J.R., R. Ayouchi, F. Martin, & D. Leinen. (2003). Growth of pure ZnO thin films prepared
by chemical spray pyrolysis on silicon. Journal of Crystal Growth, Vol. 247, pp.497–504.
Ilican, S., Y. Caglar, & M. Caglar. (20080. Preparation and Characterization of ZnO Thin Films Deposited
by Sol-Gel Spin Coating Method. Journal of Optoelectronic and Advance Material, vol. 10, pp. 2578-2583.
Saleh, W.R., N.M. Saeed, W.A. Twej, & M. Alwan. (2012). Synthesis Sol-Gel Derived Highly Transparent ZnO Thin Films for Optoelectronic Applications. Advances in Materials Physics and Chemistry, vol.2, pp.11-16.
Ismail, A. & Abdullah, M.J. (2013). The structural and optical properties of ZnO thin films prepared at
different RF sputtering power. Journal of King Saud University – Science, Vol. 25, pp.209–215.
Shin, H.H., Y.H. Joung, S.J. Kang. (2009). Influence of the substrate temperature on the optical and electrical properties of Ga-doped ZnO thin films fabricated by pulsed laser deposition. J Mater Sci: Mater Electron, 20, 704–708.
Rahmane, S., M.A. Djouadi, M.S. Aida, & N. Barreau. (2014). Oxygen Effect in Radio Frequency magnetron Sputtered Aluminium doped Zinc Oxide Film. Thin Solid Film, Vol.562, pp.70-74.
Lee, C., S.K. Hwang, S. Kim, W.I. Lee, E.H. Lee. (2007). Dependence of Resistivity and The Transmittance of Sputter-Deposited Ga-doped ZnO Films on Oxygen Partial Pressure and Sputtering Tempetature. J Mater Sci,42 : 4845-4849.
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Sutanto. (2016). Fabrikasi Semi konduktor Zinc Oxide (ZnO) Nanofiber dengan doping Al sebagai Photoanoda Single Layer dan Double Layer Pada DYE-SENSITIZED SOLAR CELL (DSSC). Skripsi. Surakarta: FT Universitas Sebelas Maret.
Gahtar A., A. Rahal, B. Benhaoua, S. Benramache. (2014). A Comparative Study on Structural and Optical
Properties of ZnO and Al-doped ZnO Thin Films Obtained by Ultrasonic Spray Method Using Different
Solvents. Elsevier. Optik, 125, 3674–3678.
Suryanarayana C & M.Grant Norton. (1998). X-ray Diffraction A Partical Approach. New York: plenum Press.
Hsu, C.W., T.C. Cheng, C.H. Yang, Y.L. Shen, J.S. Wu, S.Y. Wu. (2011). Effects of oxygen addition on physical properties of ZnO thin film grown by radio frequency reactive magnetron sputtering. Journal of Alloys and Compounds, 509: 1774–1776.
Dengyuan, Song. (2005). Zinc Oxide TCOs (Transparent Conductive Oxides) and Polycrystalli
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Published
2018-12-04
How to Cite
Astuti, B., ., S., Mahmudah, S. N., Marwoto, P., Ariyanto, D., & Wibowo, E. (2018). Oxygen Effect in Annealing Process of Aluminium Doped Zinc Oxide Films. EDUCATUM Journal of Science, Mathematics and Technology, 5(2), 33–39. https://doi.org/10.37134/ejsmt.vol5.2.4.2018
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